Share Email Print
cover

Proceedings Paper • new

Study on the destructive measurement of subsurface damage for fused silica mirror
Author(s): Yuzhu Jin; Lingyan Jiao; Yongwei Zhu; Yi Tong
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

During the course of super smooth surface processing, grinding procedure is a very important link, for one thing the subsurface damage induced by cutting can be removed, for another its quality determines the subsurface damage depth of the mirror which influences some important index such as strength, stability, coating quality and so on. Therefore, the accurate measurement of subsurface damage depth is the prerequisite to ensure the removal amount in the subsequent processing and make sure that the subsurface damage is removed completely. In this paper, based on fused silica mirror as the experimental object, free abrasives of W28 size are used to grind the mirror blank, then two destructive measurement methods are adopted respectively. The result shows that, comparing with angle polishing method, differential chemical etching method could describe the subsurface damage depth accurately.

Paper Details

Date Published: 11 January 2019
PDF: 6 pages
Proc. SPIE 10837, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 1083719 (11 January 2019); doi: 10.1117/12.2506680
Show Author Affiliations
Yuzhu Jin, Tianjin Jinhang Institute of Technical Physics (China)
Lingyan Jiao, Tianjin Jinhang Institute of Technical Physics (China)
Yongwei Zhu, Nanjing Univ. of Aeronautics and Astronautics (China)
Yi Tong, Tianjin Jinhang Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 10837:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
Xiaoliang Ma; Bin Fan; Yongjian Wan; Adrian Russell; Xiangang Luo, Editor(s)

© SPIE. Terms of Use
Back to Top