Share Email Print

Proceedings Paper • new

Study of the internal hollow structures fabricated with two typical femtosecond laser systems and their respective applications
Author(s): Chong Zheng; Ziqi Feng; Tao Chen; Anming Hu; Shibing Liu; Junwei Li
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Femtosecond (fs) laser is proved a powerful tool in the field of 3-dimensional internal micromachining inside the transparent dielectrics. There are already many types of femtosecond laser systems widely applied nowadays, among which Ti: sapphire femtosecond laser and femtosecond fiber laser are the two most frequently used typical femtosecond laser systems. However, according to our study, the differences in the laser parameters between these two femtosecond laser systems may induce significant discrepancy in manufacturing internal hollow structures inside the polymethyl methacrylate (PMMA) substrate. The experimental results show that when a 65fs laser beam is focused inside the PMMA substrate and scans a route of a straight line at an average power of 1.5W and 1 kHz repetition rate, a hollow microchannel is successfully fabricated and no melted region is found around the microchannel. However, if the PMMA substrate is constantly irradiated with the 1.5W laser pulses that generated by a 400fs femtosecond fiber laser system at a repetition rate of 100 kHz, a growing hollow cavity is observed and a melted-resolidified region is formed around the cavity. According to the numerical simulation of heat accumulation effect, we explain the ‘heat accumulation effect’ caused in the femtosecond fiber laser manufacturing and the ‘cold processing property’ of the Ti: sapphire femtosecond laser processing, respectively. These experimental and numerical results may broaden the understanding of thermal effect during the process of the femtosecond laser micromachining and provides more opportunities in the manufacturing of polymeric integrated microfluidic chip with laser direct writing technology in the future.

Paper Details

Date Published: 15 November 2018
PDF: 7 pages
Proc. SPIE 10964, Tenth International Conference on Information Optics and Photonics, 109646I (15 November 2018); doi: 10.1117/12.2506538
Show Author Affiliations
Chong Zheng, Beijing Univ. of Technology (China)
Ziqi Feng, Beijing Univ. of Technology (China)
Tao Chen, Beijing Univ. of Technology (China)
Anming Hu, The Univ. of Tennessee Knoxville (United States)
Shibing Liu, Beijing Univ. of Technology (China)
Junwei Li, Beijing Univ. of Technology (China)

Published in SPIE Proceedings Vol. 10964:
Tenth International Conference on Information Optics and Photonics
Yue Yang, Editor(s)

© SPIE. Terms of Use
Back to Top