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Study of wavefront reconstruction based on four-wave lateral shear interferometer method
Author(s): Wenbo Wan; Lihong Yang; Junhong Su
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Paper Abstract

Shear interferometer measurement method is one of main techniques in optical interferometry metrology. A shearing interferometric detection system is presented in order to obtain the three- dimensional profile of wavefront. A aperture and chessboard grating were used to divide the measured wavefront into four wavefronts, and two coherent wavefronts form an interferogram. The theoretical model of shearing interferometric detection system based on Fourier Optics and light intensity transmission equation is structured. According to the Fourier transform algorithm, an algorithm of shear interferogram processing is presented. Finally, the measured wavefront can be reconstructed. The transient wavefront detection system was applied to reconstruct the transient wavefront automatically. Experiments show that the apparatus offers higher accuracy, which satisfies the need for the practical applications. The measured results are in good agreement with the reconstructed wavefronts from SID4 wavefront sensor. The system can be applied to transient wavefront reconsitution.

Paper Details

Date Published: 18 January 2019
PDF: 7 pages
Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 108391C (18 January 2019); doi: 10.1117/12.2506493
Show Author Affiliations
Wenbo Wan, Xi'an Technological Univ. (China)
Lihong Yang, Xi'an Technological Univ. (China)
Junhong Su, Xi'an Technological Univ. (China)


Published in SPIE Proceedings Vol. 10839:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Fan Wu; Yudong Zhang; Xiaoliang Ma; Xiong Li; Bin Fan, Editor(s)

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