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Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS
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Paper Abstract

We experimentally demonstrated formation of electrically conductive structures by modifying native polydimethylsiloxane (PDMS) with femtosecond laser. By irradiating femtosecond laser pulses to native PDMS, black structures with electrical conductivity were formed. Analyses using X-ray diffraction (XRD) show that the formed structures were composed of β-silicon carbide (β-SiC). Our technique enables the spatially selective formation of β-SiC on the surface of PDMS, leading to open a novel route to develop a simple method to fabricate flexible or stretchable MEMS devices with SiC microstructures.

Paper Details

Date Published: 4 March 2019
PDF: 6 pages
Proc. SPIE 10908, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX, 1090804 (4 March 2019); doi: 10.1117/12.2506486
Show Author Affiliations
Yasutaka Nakajima, Keio Univ. (Japan)
Shuichiro Hayashi, Keio Univ. (Japan)
Akito Katayama, Keio Univ. (Japan)
Nikolay N. Nedyalkov, Bulgarian Academy of Sciences (Bulgaria)
Mitsuhiro Terakawa, Keio Univ. (Japan)


Published in SPIE Proceedings Vol. 10908:
Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX
Peter R. Herman; Michel Meunier; Roberto Osellame, Editor(s)

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