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Study on eliminating the effect of parasitic reflection on deflectometry measurement of planar optical element surface figure
Author(s): Ruiyang Wang; Dahai Li; Kaiyuan Xu; Lei Tang; Pengyu Chen
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Paper Abstract

Phase measuring deflectometry (PMD) with structured light projection and phase-shifting technique is a highly accurate optical surface measuring method. For surface shape measurement of transparent planar elements, PMD suffers from parasitic reflection. To avoid the unwanted effect of parasitic reflection, a method based on fringe frequency tuning and Fourier-transform is introduced in this paper. Numerical simulations and experiments are both conducted to evaluate the performance of the proposed method. An optical planar element with a thickness of 24.5mm is measured, and measurement error is within 200nm PV.

Paper Details

Date Published: 30 January 2019
PDF: 8 pages
Proc. SPIE 10841, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics, 1084119 (30 January 2019); doi: 10.1117/12.2506462
Show Author Affiliations
Ruiyang Wang, Sichuan Univ. (China)
Dahai Li, Sichuan Univ. (China)
Kaiyuan Xu, Research Ctr. of Laser Fusion (China)
Lei Tang, Sichuan Univ. (China)
Pengyu Chen, Sichuan Univ. (China)


Published in SPIE Proceedings Vol. 10841:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics
Mingbo Pu; Xiaoliang Ma; Xiong Li; Minghui Hong; Changtao Wang; Xiangang Luo, Editor(s)

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