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Fabrication of phononic filter structures for far-IR/sub-mm detector applications
Author(s): Kevin L. Denis; Karwan Rostem; Marco A. Sagliocca; Elissa H. Williams; Edward J. Wollack
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Paper Abstract

A photon noise limited sub-mm/far-IR cold telescope in space will require detectors with noise equivalent power (NEP) less than 1x10-19 W/Hz1/2 for imaging applications and at least an order of magnitude lower for spectroscopic studies. The detector NEP can be reduced by lowering the operation temperature and improving the thermal isolation between the bolometer and a heat bath. We report on the fabrication of membrane isolated transition edge sensor bolometers incorporating compact (<50 μm) thermal isolation beams based on phononic filters. Phononic filters are created by etching quasi-periodic nanoscale structures into supporting thermo-mechanical beams. The cross-sectional dimensions of the etched features are less than the thermal wavelength at the operating temperature, enabling coherent phonon transport to take place in one dimension. The phonon stop-band can be tuned by adjusting the scale of the quasi-periodic structures. Cascading multiple filter stages can increase bandwidth and provide improved thermal isolation similar to the function of a multi-stage electrical filter. We describe the fabrication of AlMn based transition edge sensor bolometers on silicon and silicon nitride membranes isolated by one- and two-dimensional phononic filters. The phononic filters are patterned through electron beam lithography and isolated with deep reactive ion etching.

Paper Details

Date Published: 29 May 2019
PDF: 7 pages
Proc. SPIE 10927, Photonic and Phononic Properties of Engineered Nanostructures IX, 1092720 (29 May 2019); doi: 10.1117/12.2506387
Show Author Affiliations
Kevin L. Denis, NASA Goddard Space Flight Ctr. (United States)
Karwan Rostem, NASA Goddard Space Flight Ctr. (United States)
Marco A. Sagliocca, NASA Goddard Space Flight Ctr. (United States)
Elissa H. Williams, Science Systems and Applications (United States)
Edward J. Wollack, NASA Goddard Space Flight Ctr. (United States)

Published in SPIE Proceedings Vol. 10927:
Photonic and Phononic Properties of Engineered Nanostructures IX
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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