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Ultra-precision robotic sub-aperture polishing of curved mirrors
Author(s): Songlin Wan; Xiangchao Zhang; Min Xu; Siping Peng; Jinsong Zhou
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Paper Abstract

Industrial robots have great potential for efficient and flexible polishing of large optical components, but the low positioning accuracy and control stability limits the polishing form quality. A model is established to describe the pressure distribution at the edge based on FEA analysis, and the effects of form deviation between the workpiece and the polishing pad is also investigated, thus TIFs can be calculated reliably. Polishing paths are planned to avoid sharp turning angles and fast movement, which can lead to unstable material removal. The dwell time is calculated via deconvolution with the space-variant TIFs. Experiments are conducted and the results show that the edge-roll error is significantly reduced and the polishing time is saved by 80%. Hence the robotic polisher can be comparable to the conventional polishing machines, which has a great significance for the ultra-precision optical manufacturing.

Paper Details

Date Published: 6 February 2019
PDF: 6 pages
Proc. SPIE 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology, 1084214 (6 February 2019); doi: 10.1117/12.2506361
Show Author Affiliations
Songlin Wan, Fudan Univ. (China)
Xiangchao Zhang, Fudan Univ. (China)
Min Xu, Fudan Univ. (China)
Siping Peng, Shanghai Radio Equipment Research Institute (China)
Jinsong Zhou, Beijing Sinoma Synthetic Crystals Co., Ltd. (China)


Published in SPIE Proceedings Vol. 10842:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology
Mingbo Pu; Xiong Li; Xiaoliang Ma; Rui Zhou; Xuanming Duan; Xiangang Luo, Editor(s)

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