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Proceedings Paper

Optical responsivity of mechanical resonators based on suspended membranes of graphene and transition metal dichalcogenides
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Paper Abstract

Mechanical resonators based on suspended two-dimensional membranes are promising systems for developing sensitive detectors of mass, charge and force. To measure the flexural vibrations of the membrane, it is important to employ a technique capable of resolving tiny fluctuations of vibration amplitude. To this end, researchers have been developing optical detection methods based on Fabry-Perot interferences of light between the membrane and a mirror-like substrate, which relate the intensity of light reflected by the device to the distance between the membrane and the substrate. In this work, we calculate the membrane-to-substrate distances that maximize the optical responsivity of the resonator, which we define as the derivative of the resonator’s reflectivity with respect to membrane’s displacement. In addition, we examine how various substrates with different refractive indices affect this optical responsivity, including bare silicon, silicon coated with silicon oxide, dissipative metal mirrors, and non-dissipative Bragg reflectors. Our calculation method is based on the transfer matrix method for propagating electromagnetic fields. Our results are consistent with earlier theoretical and experimental results, and offer perspectives to enhance the optical responsivity of these mechanical resonators.

Paper Details

Date Published: 24 January 2019
PDF: 9 pages
Proc. SPIE 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 1084008 (24 January 2019); doi: 10.1117/12.2506137
Show Author Affiliations
Fengnan Chen, Soochow Univ. (China)
Wenjing Mao, Soochow Univ. (China)
Chen Yang, Soochow Univ. (China)
Heng Lu, Soochow Univ. (China)
Kevin G. Schädler, ICFO - Institut de Ciències Fotòniques (Spain)
Antoine Reserbat-Plantey, ICFO - Institut de Ciències Fotòniques (Spain)
Johann Osmond, ICFO - Institut de Ciències Fotòniques (Spain)
Guoyang Cao, Soochow Univ. (China)
Xiaofeng Li, Soochow Univ. (China)
Chinhua Wang, Soochow Univ. (China)
Ying Yan, Soochow Univ. (China)
Joel Moser, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 10840:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics
Mingbo Pu; Xiong Li; Bin Fan; Min Gu; Reinhart Poprawe; Xiangang Luo, Editor(s)

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