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Modeling and simulation of electromodulation imaging spectrum based on a MEMS-FP array with a high filling-factor
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Paper Abstract

The Fabry-Perot interferometer (FP) can be used as a kind of filter for obtaining spectral information of targets in several wavelength ranges such as in the visible or infrared regions. Micro-electro-mechanical systems (MEMS) are generally micro-structures that integrate micro-sensors for converting incident microbeams into arrayed electronic signals and micro-actuators. The MEMS-FP filter constructed by combining the MEMS and FP functions, can be further integrated into a chip-level imaging spectrometer to achieve spectral imaging operation. In our design, the MEMS-FP filter is also mounted a liquid-crystal microlens array with a high filling-factor. The key micro-bridges of each MEMS-FP unit are modeled and simulated in this paper. We have designed two types of supporting structures and simulated them with the simulation software COMSOL Multiphysics 5.2. The key factors include tuning range, filling-factor, and parallelism of the bridges. After calculating and analyzing, we found that the tuning range can be optimized by changing the thickness of the micro-bridge and the arm width of the cantilever beam. The filling-factor is already increased by geometry design. The parallelism of the bridge in the two micro-structures differs greatly, which is related to the shape of the bridge itself. According to the simulations, a tuning range of 160 nm has been achieved in the visible and near-infrared wavelength range, with a maximum filling-factor of more than ~80%.

Paper Details

Date Published: 15 November 2018
PDF: 6 pages
Proc. SPIE 10964, Tenth International Conference on Information Optics and Photonics, 109644O (15 November 2018); doi: 10.1117/12.2506135
Show Author Affiliations
Jinxing Liu, Huazhong Univ. of Science and Technology (China)
Chai Hu, Huazhong Univ. of Science and Technology (China)
Leilei Niu, Huazhong Univ. of Science and Technology (China)
Xinyu Zhang, Huazhong Univ. of Science and Technology (China)
Haiwei Wang, Huazhong Univ. of Science and Technology (China)
Changsheng Xie, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 10964:
Tenth International Conference on Information Optics and Photonics
Yue Yang, Editor(s)

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