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Aging and noise characteristics studying of Low temperature preparing Mn-Co-Ni-O thin films
Author(s): Yiming Yin; Wei Zhou; Jing Wu; Lin Jiang; Zhiming Huang
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Paper Abstract

Mn1.56Co0.96Ni0.48O4 (MCN) thin films with 2 μm thickness were deposited on amorphous Al2O3 substrates by Radio Frequency magnetron sputtering at 450℃, films were annealed at 450℃, 600℃ and 750℃ separately. XRD test showed that MCN thin films deposited at 450℃ possess preferential orientation (400). The variable temperature resistivity test revealed the resistivity of MCN films decreases with the annealed temperature increases. Aging testing showed that films grown at 450℃ and annealed at the same temperature had moderate aging coefficient, meanwhile, the films exhibited favorable noise performance. This paper reports a method to prepare MCN thin films with moderate resistivity, favorable aging and noise characteristics at low temperature(450℃), which is expected to be integrated with the silicon process and has great significance for developing MCN thin film linear or focal plane devices.

Paper Details

Date Published: 8 February 2019
PDF: 7 pages
Proc. SPIE 10843, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging, 108430O (8 February 2019); doi: 10.1117/12.2506111
Show Author Affiliations
Yiming Yin, Univ. of Chinese Academy of Sciences (China)
Shanghai Institute of Technical Physics (China)
Wei Zhou, Shanghai Institute of Technical Physics (China)
Jing Wu, Shanghai Institute of Technical Physics (China)
Lin Jiang, Shanghai Institute of Technical Physics (China)
Zhiming Huang, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 10843:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging
Yadong Jiang; Xiaoliang Ma; Xiong Li; Mingbo Pu; Xue Feng; Bernard Kippelen, Editor(s)

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