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Proceedings Paper

Analysis of laser-induced damage in optical thin film based on ANSYS
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Paper Abstract

The electric and thermal effects of optical thin film irradiated by Gaussian-pulsed laser are simulated with finite element method (FEM) based on the software ANSYS. The electric field intensity distribution of HfO2/SiO2 high reflective (HR) film is investigated. The transient heat-conduction model of the film is established for the calculation of temperature field of optical thin film coating. Simulation results show that, multilayer films are more prone to damage than single film, and the upper layer of HfO2 layer in the spot center may easily be damaged.

Paper Details

Date Published: 15 November 2018
PDF: 6 pages
Proc. SPIE 10964, Tenth International Conference on Information Optics and Photonics, 109642M (15 November 2018); doi: 10.1117/12.2505819
Show Author Affiliations
Fei Wang, Soochow Univ. (China)
Kejun Chen, Soochow Univ. (China)
Fan Gao, Soochow Univ. (China)
Xiao Yuan, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 10964:
Tenth International Conference on Information Optics and Photonics
Yidong Huang, Editor(s)

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