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High-resolution wave front phase sensor for silicon wafer metrology
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Paper Abstract

In this work we present a novel wave front phase sensing technique developed by Wooptix. This new wave front phase sensor uses only standard imaging sensor, and does not need any specialized optical hardware to sample the optical field. In addition, the wave front phase recovery is zonal, thus, the obtained wave front phase map provides as much height data points, as pixels in the imaging sensor. We will develop the mathematical foundations of this instrument as well as theoretical and practical limits. Finally, we will expose the application of this sensor to silicon wafer metrology and comparisons against industry standard metrology instruments.

Paper Details

Date Published: 4 March 2019
PDF: 10 pages
Proc. SPIE 10925, Photonic Instrumentation Engineering VI, 109250I (4 March 2019); doi: 10.1117/12.2505764
Show Author Affiliations
J. M. Trujillo-Sevilla, Wooptix, S.L. (Spain)
O. Casanova Gonzalez, Wooptix, S.L. (Spain)
S. Bonaque-González, Wooptix, S.L. (Spain)
J. Gaudestad, Wooptix, S.L. (Spain)
J. M. Rodríguez Ramos, Wooptix S.L. (Spain)
Univ. de La Laguna (Spain)


Published in SPIE Proceedings Vol. 10925:
Photonic Instrumentation Engineering VI
Yakov G. Soskind, Editor(s)

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