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Optical design and analysis of a high resolution MOEMS accelerometer based on diffraction grating
Author(s): Yuan Yao; Debin Pan; Anbing Geng; Haitao Wang; Jian Bai; Qianbo Lu; Peiwen Chen; Weidong Fang
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Paper Abstract

The design and analysis method of a MOEMS accelerometer consisting of a grating interferometry cavity and a micromachined sensing chip is presented in this paper. The grating interferometeric cavity is composed of a frequency-stabilized laser source, a diffraction grating, and a mirror ,to realize a subnanometer resolution. With an ultrasensitive micromachined chip, the MOEMS accelerometer can finally achieve a few ug resolution. This paper combines the geometrical optics and nano optics design methods to simulate the whole system, analyses how the divergence angle, grating constant and the length of the interferometeric cavity influence the ultimate sensitivity. A new set of MOEMS accelerometer is proposed, the theoretical analysis shows that the acceleration sensitivity can achieve 1200 v/g, and the resolution remains 1.3ug.

Paper Details

Date Published: 12 December 2018
PDF: 8 pages
Proc. SPIE 10848, Micro-Optics and MOEMS, 108480G (12 December 2018); doi: 10.1117/12.2505677
Show Author Affiliations
Yuan Yao, Huazhong Univ. of Science and Technology (China)
Huazhong Institute of Electro-Optics (China)
Debin Pan, Huazhong Institute of Electro-Optics (China)
Anbing Geng, Huazhong Institute of Electro-Optics (China)
Haitao Wang, Huazhong Institute of Electro-Optics (China)
Jian Bai, Zhejiang Univ. (China)
Qianbo Lu, Zhejiang Univ. (China)
Peiwen Chen, Zhejiang Univ. (China)
Weidong Fang, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 10848:
Micro-Optics and MOEMS
Yuelin Wang; Huikai Xie, Editor(s)

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