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Research on adaptive interferometric measurement of complex vibration environment
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Paper Abstract

In complex phase-shift interferometry, an adaptive phase algorithm based on complex vibration environment is proposed. The phase shift amount calculation of two or more interferometric images could be achieved by self-adaptive phase-shift algorithm (SPA), a closed-loop feedback system is constructed to adaptively correct the characteristic phase shift amount in which the phase shift step length is a set value, thereby realizing self-correction of the phase shift error. According to the actual examinations, the single-step phase shift error is less than π/50, and PV and RMS values of plane objects were obtained respectively better than λ/20 and λ/100. Additionally, the feasibility of the algorithm and the self-adaptive correction system for complex vibration environment were verified. The results show that the proposed method achieves high-speed and high-precision phase-shift extraction, greatly reducing the phase shift error caused by vibration interference, and the overall operation of measurement process is simple relatively.

Paper Details

Date Published: 18 January 2019
PDF: 13 pages
Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 1083912 (18 January 2019); doi: 10.1117/12.2505551
Show Author Affiliations
Zhi-Liang Zhao, Chengdu TYGGO Photoelectricity Co., Ltd. (China)
Chengdu Fine Optics Engineering Research Ctr. (China)
Min Liu, Chengdu TYGGO Photoelectricity Co., Ltd. (China)
Li-Hua Chen, Chengdu Fine Optics Engineering Research Ctr. (China)
Zi-Jia Zhao, Chengdu TYGGO Photoelectricity Co., Ltd. (China)
Zhi-Hua Zhang, Chengdu TYGGO Photoelectricity Co., Ltd. (China)


Published in SPIE Proceedings Vol. 10839:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Fan Wu; Yudong Zhang; Xiaoliang Ma; Xiong Li; Bin Fan, Editor(s)

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