Share Email Print
cover

Proceedings Paper • new

Research on the displacement characteristic of piezoelectric transducer
Author(s): Fang Wang; Xin Huang; Bo Zhang; Qingjie Lu; Shuo Zhu; Shouhong Tang; Sen Han
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Piezoelectric transducer (PZT) is often used in the field of precision measurement to realize the micro-positioning function, such as Fizeau interferometer. But due to its inherent severe hysteresis and nonlinear characteristics, the use of piezoelectric transducer is affected. A piezoelectric transducer control instrument was designed to measure the displacement characteristic curve of piezoelectric transducer. The instrument included the control system and data received system. The control system produces a triangular wave signal with adjustable amplitude and frequency, then calculated from received signal to drive the piezoelectric transducer. The output displacement information of piezoelectric transducer is collected by the signal acquisition circuit composed of displacement sensor and ADC analog-digital converter. The purpose of the single chip is collecting and processing displacement data. According to the experimental results, we can get the characteristics curve of the piezoelectric transducer, which support the basis analysis and available for the future experiment.

Paper Details

Date Published: 26 December 2018
PDF: 9 pages
Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 1081905 (26 December 2018); doi: 10.1117/12.2505462
Show Author Affiliations
Fang Wang, Univ. of Shanghai for Science and Technology (China)
Suzhou H&L Instruments LLC (China)
Xin Huang, Univ. of Shanghai for Science and Technology (China)
Suzhou H&L Instruments LLC (China)
Bo Zhang, Univ. of Shanghai for Science and Technology (China)
Suzhou H&L Instruments LLC (China)
Qingjie Lu, Univ. of Shanghai for Science and Technology (China)
Suzhou H&L Instruments LLC (China)
Shuo Zhu, Univ. of Shanghai for Science and Technology (China)
Suzhou H&L Instruments LLC (China)
Shouhong Tang, Univ. of Shanghai for Science and Technology (China)
Suzhou H&L Instruments LLC (China)
Sen Han, Univ of Shanghai for Science and Technology (China)
Suzhou H&L Instruments LLC (China)


Published in SPIE Proceedings Vol. 10819:
Optical Metrology and Inspection for Industrial Applications V
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

© SPIE. Terms of Use
Back to Top