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Non-paraxial diffraction of tiny pinhole illuminated by partially coherent light
Author(s): Zengxiong Lu; Yuejing Qi; Jiani Su; Qingyang Zhang; Bing Li; Guanghua Yang; Wei Qi
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Paper Abstract

The theory of partial coherence has important applications in many fields such as optical system imaging, optical projection lithography, optical communication and speckle metrology. A tiny pinhole is essential to calibrate the wavefront error of the collimating lens when testing the wavefront error of the projection optics by using the method of Shack-Hartmann wavefront sensor. In this paper, a formulation is developed for investigating the intensity distribution in the far field diffracted by a circular tiny pinhole illuminated with partially coherent light. Assuming that aperture complex coherence is Bessel's correlation, the diffraction field far away from the pinhole is numerical calculated. The actual distribution of the field diffracted by the tiny pinhole is influenced by both the pinhole diameter and the coherence of light inside the pinhole aperture.

Paper Details

Date Published: 24 January 2019
PDF: 6 pages
Proc. SPIE 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 1084003 (24 January 2019); doi: 10.1117/12.2505387
Show Author Affiliations
Zengxiong Lu, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Yuejing Qi, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Jiani Su, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Qingyang Zhang, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Bing Li, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Guanghua Yang, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Wei Qi, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)


Published in SPIE Proceedings Vol. 10840:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics
Mingbo Pu; Xiong Li; Bin Fan; Min Gu; Reinhart Poprawe; Xiangang Luo, Editor(s)

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