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Micro-scanning mechanism design based on dynamic model
Author(s): Li-wei Huang; Guang-li Sun; Jiang-peng Song; Shi-xun Fan
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Paper Abstract

Micro-Scanning Mechanism (MSM) is the important component of super-resolution imaging/stabilization system. Through the MSM, the resolution of the infrared imaging system can be improved without increasing the total number of detection elements of the infrared focal plane detector, extending the working distance of the thermal imaging system and eliminating the detection blind zone caused by the small filling factor of the detector. This work was focused on the model-based design method of MSM, in order to improve the design efficiency and reduce design costs. The dynamic model of MSM was established, and the MSM design method based on this model was proposed. The structure and working principle of MSM were introduced, and the high-order resonance and axial coupling of MSM were analyzed. Based on this model, the main parameters of a certain MSM were designed. The simulation results meet the design requirements, effectively improving the design efficiency and reducing the design cost.

Paper Details

Date Published: 12 December 2018
PDF: 7 pages
Proc. SPIE 10848, Micro-Optics and MOEMS, 1084809 (12 December 2018); doi: 10.1117/12.2505166
Show Author Affiliations
Li-wei Huang, Tianjin Jinhang Institute of Technical Physics (China)
Guang-li Sun, Tianjin Jinhang Institute of Technical Physics (China)
Jiang-peng Song, Tianjin Jinhang Institute of Technical Physics (China)
Shi-xun Fan, National Univ. of Defense Technology (China)


Published in SPIE Proceedings Vol. 10848:
Micro-Optics and MOEMS
Yuelin Wang; Huikai Xie, Editor(s)

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