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Investigation on the control technique of surface roughness for silicate glass
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Paper Abstract

The influence of polishing parameters such as particle size, pad material and pressure on the surface roughness of glass optics were investigated and analysed. It reveals that the surface roughness will get worse with increase of the polishing particle size. The surface roughness would remain stable in a certain period of polishing pressure, but get worse with increase of the pressure beyond the period. The surface roughness is getting better when using smooth pitch polishing pad than polyurethane pad with lots of micropores. By optimizing the polishing parameters, the surface roughness of large aperture fused silica window is improved to 0.46nm before band-pass filtering and 0.084nm after band-pass filtering.

Paper Details

Date Published: 16 January 2019
PDF: 8 pages
Proc. SPIE 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 108380M (16 January 2019); doi: 10.1117/12.2504961
Show Author Affiliations
Xiang He, Chengdu Fine Optical Engineering Research Ctr. (China)
Lei Xie, Chengdu Fine Optical Engineering Research Ctr. (China)
Chao Cai, Chengdu Fine Optical Engineering Research Ctr. (China)
Jinyong Huang, Chengdu Fine Optical Engineering Research Ctr. (China)
Qing Hu, Chengdu Fine Optical Engineering Research Ctr. (China)
Dingyao Yan, Chengdu Fine Optical Engineering Research Ctr. (China)
Ping Ma, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 10838:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Xiong Li; William T. Plummer; Bin Fan; Mingbo Pu; Yongjian Wan; Xiangang Luo, Editor(s)

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