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Optimal modified lateral shearing interferometer for in-line damage morphology measurement
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Paper Abstract

The damage morphology information is crucially important for optical components to analysis laser-induced damage resistance. Because of complex configurations, some high-precision and high-resolution techniques have limitations to detect in-line damage sites. Thus, a modified lateral shearing interferometer is proposed to obtain three- dimensional damage morphology information. In the presented method, the original beam passing through damage sites is magnified by a microscope system, and separated by a parallel plate into two sub-beams. In the overlap region of the sub-beams, the interference pattern can be used to extract the damage morphology information. Systematic errors are also eliminated from obtained interferograms before and after pulse laser irradiation, respectively. Experimental results are presented to confirm the feasibility of the proposed lateral shearing interferometer for in-line damage morphology measurement.

Paper Details

Date Published: 18 January 2019
PDF: 8 pages
Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 108390G (18 January 2019); doi: 10.1117/12.2504885
Show Author Affiliations
Jie Li, Research Ctr. of Laser Fusion (China)
Rongsheng Ba, Research Ctr. of Laser Fusion (China)
Xinda Zhou, Research Ctr. of Laser Fusion (China)
Yinbo Zheng, Research Ctr. of Laser Fusion (China)
Lei Ding, Research Ctr. of Laser Fusion (China)
Jing Yuan, Research Ctr. of Laser Fusion (China)
Liqun Chai, Research Ctr. of Laser Fusion (China)


Published in SPIE Proceedings Vol. 10839:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Fan Wu; Yudong Zhang; Xiaoliang Ma; Xiong Li; Bin Fan, Editor(s)

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