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Stabilization mechanism of miniature extrinsic Fabry-Perot sensors based on micromachined diaphragm
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Paper Abstract

The stability features of the miniature fiber optic extrinsic Fabry-Perot interferometric (EFPI) sensors are important to signal recovery. In this paper, we explore the stabilization mechanism of the micromachined diaphragmbased EFPI sensors by means of the workpoint drift. Three sensors with the same sensing units but different encapsulation structures were fabricated to achieve comprehensive demonstration. Experiments were carried out separately in air and in water within a wavelength-tunable workpoint feedback control (WPFC) configuration. Results show that these three different sensors present distinguished workpoint drift rates. The main disturbance which cause the workpoint drift comes from the thermal exchange of the sensing diaphragm with the surroundings. Whereas a fast drift rate could disable WPFC, a totally enclosed encapsulation structure could help to improve the stability of the EFPI sensors.

Paper Details

Date Published: 8 February 2019
PDF: 5 pages
Proc. SPIE 10843, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging, 1084302 (8 February 2019); doi: 10.1117/12.2504757
Show Author Affiliations
Fuyin Wang, National Univ. of Defense Technology (China)
Shuidong Xiong, National Univ. of Defense Technology (China)
Hong Luo, National Univ. of Defense Technology (China)
Qiong Yao, National Univ. of Defense Technology (China)
Zhengzheng Shao, National Univ. of Defense Technology (China)


Published in SPIE Proceedings Vol. 10843:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging
Yadong Jiang; Xiaoliang Ma; Xiong Li; Mingbo Pu; Xue Feng; Bernard Kippelen, Editor(s)

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