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A surface plasmon resonance sensor based on silicon-on-insulator rib waveguide
Author(s): Yueming Liu; Xi Wang; Ying Ding; Xiaohao Wang
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Paper Abstract

Taking the advantages of SOI rib waveguide, a compact and efficient SPR sensor based on SOI rib waveguide is proposed. Ribs and air trenches are formed by ICP deep etch on SOI wafer. Then, the metal film for SPR is sputtered on the sidewall of the air trench. A tunable laser and an optical power meter are used to test the sensor. The sensor with micron dimensions can be directly end face coupled with the single-mode fibers of the laser and the power meter. Resonance curves of water and milk are obtained. The sensitivity of the sensor can reach 1200nm/RIU.

Paper Details

Date Published: 23 October 2018
PDF: 12 pages
Proc. SPIE 10821, Advanced Sensor Systems and Applications VIII, 1082104 (23 October 2018); doi: 10.1117/12.2504272
Show Author Affiliations
Yueming Liu, Tsinghua Univ. (China)
Xi Wang, Tsinghua Univ. (China)
Ying Ding, Tsinghua Univ. (China)
Xiaohao Wang, Tsinghua Univ. (China)
Tsinghua-Berkeley Shenzhen Institute (China)


Published in SPIE Proceedings Vol. 10821:
Advanced Sensor Systems and Applications VIII
Tiegen Liu; Shibin Jiang, Editor(s)

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