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Proceedings Paper

Experimental investigations of quality trapezoidal shape PMMA microchannel prepared by CO2 laser
Author(s): Tianhao Wu; Changjun Ke; Yutong Wang
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Paper Abstract

CO2 lasers often produce PMMA microchannels, as non-metallic materials have a strong absorption capability for mid and far infrared. Triangular cross-section microchannels have been fabricated by conventional methods, due to the Gaussian distribution of laser intensity. It cannot meet the requirements of microfluidic chips sometimes. In this paper, a multi-pass translational method is proposed, which based on the lateral heat-affected zone (HAZ) formed by single ablation, and multiple ablation with its width. This way not only produces a clean bottom like the static multi-pass method, but can modify the cross-sectional topography to produce a clean trapezoidal microchannel. Next, we evaluated the topography of microchannel by introducing the parameter "S", analyzing the variations in surface roughness and HAZ. All these indicate that the multi-pass translational method is a rapid and economic way of fabricating high quality trapezoidal microchannel on PMMA-based microfluidic devices.

Paper Details

Date Published: 15 November 2018
PDF: 8 pages
Proc. SPIE 10964, Tenth International Conference on Information Optics and Photonics, 109640B (15 November 2018); doi: 10.1117/12.2504070
Show Author Affiliations
Tianhao Wu, Institute of Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Changjun Ke, Institute of Electronics (China)
Yutong Wang, Institute of Electronics (China)
Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 10964:
Tenth International Conference on Information Optics and Photonics
Yidong Huang, Editor(s)

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