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Monte Carlo investigation of cell defects on detection properties in radial packed square-pore micro-channel optics
Author(s): Hua Cai; Kangsheng Huang; Jiuwang Wang; Yong Sun; Hui Liu; Tiezhu Bo; Qing Li; Xiaoxuan Shi; Chang Liu; Caili Wang; Juan Liu; Shiyong Xie; Jinsheng Jia
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Paper Abstract

Micro-channel optics (MPO) is a two dimensional arrays of capillary channel EUV/X-ray imaging precision optics. Imaging quality and detection efficiency are crucial to EUV/X-ray detection. Radial packed square-pore type micro-channel optics (RPMPO) is a novel MPO, which is preferable to the cruciform focus of Square packed square-pore micro-channel optics (SPMPO, namely Lobster eye optics) geometry. Cell defects of micro-channel affect the imaging quality and detection efficiency seriously, however, which were inevitable in the MPO manufacturing. In this paper, characteristics of focusing images for standard and defect states RPMPOs were compared by ray trace method of Monte Carlo algorithm. Three main cell defects, such as Taper, Twist and Nonsquare, were investigated in the influence on the imaging quality and detection efficiency under different cell flaw sizes. Results indicated that under a constant illumination, Nonsquare defects of cell affected the detection efficiency most, twist defects did less, and taper defects did least. Besides, twist defects of cell affected the quality of focal image most, nonsquare defects did less, and taper defects did least. The detection efficiency decreasing obeyed the Boltzmann, Bidoseresp and Lorentz function as the increasing of conical degree, twist angle and fillet radius in taper, twist and nonsquare defect, respectively. The focal imaging quality deteriorating obeyed Expdec1, Expdec3 and Langevin distribution with the increasing of conical degree, twist angle and fillet radius in taper, twist and nonsquare defect, respectively.This results supplied a significant support for the future researches on curved MPO and EUV/X-ray optical system based on MPO.

Paper Details

Date Published: 12 December 2018
PDF: 8 pages
Proc. SPIE 10848, Micro-Optics and MOEMS, 1084805 (12 December 2018); doi: 10.1117/12.2503896
Show Author Affiliations
Hua Cai, China Building Materials Academy (China)
Kangsheng Huang, China Building Materials Academy (China)
Jiuwang Wang, China Building Materials Academy (China)
Yong Sun, China Building Materials Academy (China)
Hui Liu, China Building Materials Academy (China)
Tiezhu Bo, China Building Materials Academy (China)
Qing Li, China Building Materials Academy (China)
Xiaoxuan Shi, China Building Materials Academy (China)
Chang Liu, China Building Materials Academy (China)
Caili Wang, China Building Materials Academy (China)
Juan Liu, China Building Materials Academy (China)
Shiyong Xie, China Building Materials Academy (China)
Jinsheng Jia, China Building Materials Academy (China)


Published in SPIE Proceedings Vol. 10848:
Micro-Optics and MOEMS
Yuelin Wang; Huikai Xie, Editor(s)

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