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Proceedings Paper

Efficiency-improved silicon thermo-optic switches with deep trenches
Author(s): Rui Zhu; Yun Lai; Xin Zhou; Xiangning Chen
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Paper Abstract

In this paper, two 2×2 Mach-Zehnder thermo-optic switches with and without two deep air trenches on both sides of the active arm are designed and fabricated on silicon-on-insulator(SOI) wafer. The experimental results show that switching powers of the two switches with and without trenches are 22.33 mW and 28.44 mW respectively when operated at 1560 nm wavelength. That is to say, the switching power of thermo-optic switch is reduced by 21.5 % due to the trenches. Moreover, the extinction ratios of the cross state are both over 32 dB.

Paper Details

Date Published: 12 December 2018
PDF: 4 pages
Proc. SPIE 10849, Fiber Optic Sensing and Optical Communication, 1084909 (12 December 2018); doi: 10.1117/12.2503636
Show Author Affiliations
Rui Zhu, Nanjing Univ. (China)
Yun Lai, Nanjing Univ. (China)
Xin Zhou, Nanjing Univ. (China)
Xiangning Chen, Nanjing Univ. (China)


Published in SPIE Proceedings Vol. 10849:
Fiber Optic Sensing and Optical Communication
Jie Zhang; Songnian Fu; Qunbi Zhuge; Ming Tang; Tuan Guo, Editor(s)

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