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Digital uncooled IRFPAs based on microbolometers with 17 µm and 12 µm pixel pitch
Author(s): Dirk Weiler; Frank Hochschulz; Claudia Busch; Matthias Stein; Marvin D. Michel; Andreas Kuhl; Renee Lerch; Martin Petermann; Thomas Geruschke; Sebastian Blaeser; Sascha Weyers; Holger Vogt
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Paper Abstract

This paper presents the results of high-performance infrared detectors (IRFPA – InfraRed Focal Plane Array) based on uncooled microbolometers with 17 μm and 12 μm pixel pitch and a chip-scale-package as the vacuum package developed and fabricated by Fraunhofer-IMS. Like CMOS image sensor IRFPAs also have been following the trend of reducing the pixel size in order to reduce the costs and increase the optical resolution. For microbolometer based uncooled IRFPA the pixel pitch has been reduced from 35 μm pixel pitch ten years ago via 25 μm and 17 μm down to 12 μm. Fraunhofer IMS has developed digital IRFPAs featuring a direct conversion of the microbolometer’s resistance into a 16 bit value by the use of massively parallel on-chip Sigma-Delta-ADCs achieving a high scene temperature dynamic range of more than 300 K and a very low NETD-value below 50 mK. Due to a broad-band antireflection coating the digital IRFPAs achieve a high sensitivity in the LWIR (wavelength 8 μm to 14 μm) and MWIR (wavelength 3 μm to 5 μm) range. In this paper the microbolometer, the vacuum-packaging, the architecture of the readout electronics, and the electro-optical performance characterization will be presented.

Paper Details

Date Published: 9 October 2018
PDF: 7 pages
Proc. SPIE 10795, Electro-Optical and Infrared Systems: Technology and Applications XV, 1079504 (9 October 2018); doi: 10.1117/12.2503423
Show Author Affiliations
Dirk Weiler, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Frank Hochschulz, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Claudia Busch, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Matthias Stein, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Marvin D. Michel, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Andreas Kuhl, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Renee Lerch, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Martin Petermann, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Thomas Geruschke, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Sebastian Blaeser, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Sascha Weyers, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Holger Vogt, Univ. of Duisburg-Essen (Germany)


Published in SPIE Proceedings Vol. 10795:
Electro-Optical and Infrared Systems: Technology and Applications XV
David A. Huckridge; Helge Bürsing; Duncan L. Hickman, Editor(s)

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