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Proceedings Paper

Investigation of physical properties of ZnO semiconductor material for biocompatible coating layer applications
Author(s): Przemyslaw Struk; Michal A. Borysiewicz
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Paper Abstract

The paper presents investigation of physical properties of ZnO semiconductor for biomedical applications as a coating layer for example in medical devices and structures. The research was focused on determination of surface topography by SEM method, surface roughness by AFM method, chemical composition by EDS method and crystalline structure of ZnO by Raman spectroscopy. The investigated ZnO coating was deposited by reactive magnetron sputtering on quartz substrate.

Paper Details

Date Published: 14 August 2018
PDF: 4 pages
Proc. SPIE 10830, 13th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, 108300L (14 August 2018); doi: 10.1117/12.2503228
Show Author Affiliations
Przemyslaw Struk, Silesian Univ. of Technology (Poland)
Michal A. Borysiewicz, Institute of Electron Technology (Poland)


Published in SPIE Proceedings Vol. 10830:
13th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods
Przemyslaw Struk; Tadeusz Pustelny, Editor(s)

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