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Proceedings Paper

Germanium implanted photonic devices for post-fabrication trimming and programmable circuits
Author(s): Xia Chen; Milan M. Milosevic; Xingshi Yu; Bigeng Chen; Antoine F. J. Runge; Ali Z. Khokhar; Sakellaris Mailis; David J. Thomson; Anna C. Peacock; Shinichi Saito; Otto L. Muskens; Graham T. Reed
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Paper Abstract

We reviewed our recent developments on the post-fabrication trimming techniques and programmable photonic circuits based on germanium ion implanted silicon waveguides. Annealing of ion implanted silicon can efficiently change the refractive index. This technology has been employed to fine-tune the optical phase, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. High accuracy phase trimming was achieved with laser annealing and a real-time feedback control system. Erasable waveguides and directional couplers were also demonstrated, which can be used to implement programmable photonic circuits with low power consumption.

Paper Details

Date Published: 25 October 2018
PDF: 8 pages
Proc. SPIE 10823, Nanophotonics and Micro/Nano Optics IV, 108230U (25 October 2018); doi: 10.1117/12.2503224
Show Author Affiliations
Xia Chen, Univ. of Southampton (United Kingdom)
Milan M. Milosevic, Univ. of Southampton (United Kingdom)
Xingshi Yu, Univ. of Southampton (United Kingdom)
Bigeng Chen, Univ. of Southampton (United Kingdom)
Antoine F. J. Runge, Univ. of Southampton (United Kingdom)
Ali Z. Khokhar, Univ. of Southampton (United Kingdom)
Sakellaris Mailis, Univ. of Southampton (United Kingdom)
David J. Thomson, Univ. of Southampton (United Kingdom)
Anna C. Peacock, Univ. of Southampton (United Kingdom)
Shinichi Saito, Univ. of Southampton (United Kingdom)
Otto L. Muskens, Univ. of Southampton (United Kingdom)
Graham T. Reed, Univ. of Southampton (United Kingdom)


Published in SPIE Proceedings Vol. 10823:
Nanophotonics and Micro/Nano Optics IV
Zhiping Zhou; Kazumi Wada, Editor(s)

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