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Proceedings Paper

Progress in gas purifiers for industrial excimer lasers
Author(s): Graham A. Naylor; Andrew John Kearsley
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Paper Abstract

New Results on the trapping efficiency of cryogenic gas purifiers indicate that efficiencies of over 95 can be obtained. High power industrial excimer lasers operate at high buffer gas pressures and use large volume discharge vessels. A prototype gas purifier offering a circulation flow rate and operating pressure twice that of a conventional gas purifier has been developed. The performance and applicability of this device to industrial excimer lasers will be discussed.

Paper Details

Date Published: 1 March 1991
PDF: 6 pages
Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25031
Show Author Affiliations
Graham A. Naylor, Oxford Lasers Ltd. (United Kingdom)
Andrew John Kearsley, Oxford Lasers Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 1377:
Excimer Laser Materials Processing and Beam Delivery Systems
Bernhard P. Piwczyk, Editor(s)

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