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Proceedings Paper

Gas handling technology for excimer lasers
Author(s): Robert E. Turner; John L. Remo; Elaine Bradford; Alvin Dietz
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Paper Abstract

Excimer laser performance and operational efficiency can be enhanced by simultaneously applying several different approaches related to gas technology. Causes of laser beam power and profile decay, as well as degradation of laser cczriponents are detailed with special regard to laser gases. 4ethods for canbating these deleterious effects are then detailed. These include in—depth discussion of (1) initial gas purity, (2) gas handling between source and laser, (3) laser operating techniques, and (4) in—situ gas purification.

Paper Details

Date Published: 1 March 1991
PDF: 8 pages
Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25030
Show Author Affiliations
Robert E. Turner, Applied Photonics Inc. (United States)
John L. Remo, Applied Photonics Inc. (United States)
Elaine Bradford, Spectra Gases, Inc. (United States)
Alvin Dietz, Spectra Gases, Inc. (United States)

Published in SPIE Proceedings Vol. 1377:
Excimer Laser Materials Processing and Beam Delivery Systems
Bernhard P. Piwczyk, Editor(s)

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