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Proceedings Paper

Coating development for high-energy KrF excimer lasers
Author(s): James D. Boyer; Billie R. Mauro; Virgil E. Sanders
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Paper Abstract

Damage resistant optical coatings are needed for cost effective beam delivery systems for high energy laser applications. At excimer wavelengths the photon energy either exceeds or is comparable to bandgap energies of most materials and limits the materials suitable for optical coatings. Other constraints are imposed by limits on near specular scatter and fluorine resistance for selected components.

Paper Details

Date Published: 1 March 1991
PDF: 7 pages
Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25028
Show Author Affiliations
James D. Boyer, Los Alamos National Lab. (United States)
Billie R. Mauro, Los Alamos National Lab. (United States)
Virgil E. Sanders, Los Alamos National Lab. (United States)


Published in SPIE Proceedings Vol. 1377:
Excimer Laser Materials Processing and Beam Delivery Systems
Bernhard P. Piwczyk, Editor(s)

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