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Proceedings Paper

CGH and stitching technique: powerful combination enabling full-surface figure measurements of certain classes of aspheres
Author(s): Chunyu Zhao
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Paper Abstract

The Computer Generated Hologram is the de facto standard for measuring surface figures of aspheres interferometrically. The CGH size is limited though by the main stream fabrication technologies which were developed for mask making by semiconductor industry. The precision CGHs are predominantly made on 6”x6”x0.25” fused silica substrates, which makes it impossible to measure in full certain classes of aspheres, e.g., long cylinders, large convex aspheres, etc. However, the impossible is made possible by combining the CGH and the stitching technique which was first developed for measuring large flats. In this paper, specifics on implementing this metrology approach are discussed, and examples are presented to demonstrate its effectiveness.

Paper Details

Date Published: 5 November 2018
PDF: 8 pages
Proc. SPIE 10815, Optical Design and Testing VIII, 1081503 (5 November 2018); doi: 10.1117/12.2502572
Show Author Affiliations
Chunyu Zhao, Arizona Optical Metrology LLC (United States)

Published in SPIE Proceedings Vol. 10815:
Optical Design and Testing VIII
Yongtian Wang; Tina E. Kidger; Kimio Tatsuno, Editor(s)

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