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Proceedings Paper

Very large area YBa2 Cu3O7-delta film deposition
Author(s): Helmut Kinder; Robert Semerad; Paul Berberich; Bernd Utz; Werner Prusseit
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Paper Abstract

Large area deposition of YBa2Cu3O7-(delta ) is desirable for cost-effective production of thin superconducting films at larger scale. Our technique of thermal co-evaporation should be particularly well suited for this goal because it is intrinsically homogenous. We have achieved large area deposition by using a rotating disk heater with an oxygen pocket. This arrangement allows for intermittent metal deposition and oxidation scheme with which we fabricate separated zones.Here we present a improved version of this deposition scheme with which we fabricate high quality YBCO films on an area which is 9 inches in diameter. The area is used for simultaneous deposition on smaller wafers, e.g. 12 wafers of 2 inches, or for large sapphire wafers of 8 inches.

Paper Details

Date Published: 5 July 1996
PDF: 6 pages
Proc. SPIE 2697, Oxide Superconductor Physics and Nano-Engineering II, (5 July 1996); doi: 10.1117/12.250238
Show Author Affiliations
Helmut Kinder, Technische Univ. Muenchen (Germany)
Robert Semerad, Technische Univ. Muenchen (Germany)
Paul Berberich, Technische Univ. Muenchen (Germany)
Bernd Utz, Technische Univ. Muenchen (Germany)
Werner Prusseit, Technische Univ. Muenchen (Germany)

Published in SPIE Proceedings Vol. 2697:
Oxide Superconductor Physics and Nano-Engineering II
Ivan Bozovic; Davor Pavuna, Editor(s)

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