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Proceedings Paper

Experimental study on the in-situ measurement for large optical flats
Author(s): Xin Wu; Yingjie Yu
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Paper Abstract

In-situ measurement is an ideal method to improve the precision and efficiency of manufacturing. This paper developed an in-situ subaperture stitching interferometric measuring system for large plano optics in the workshop environment. It can realize high precision and considerable repeatability. The principle of in-situ subaperture stitching measurement was introduced briefly. A validation test has been presented to verify that the in-situ measuring can be realized with the developed system.

Paper Details

Date Published: 24 July 2018
PDF: 6 pages
Proc. SPIE 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 108270L (24 July 2018); doi: 10.1117/12.2502160
Show Author Affiliations
Xin Wu, Shanghai Univ. (China)
Yingjie Yu, Shanghai Univ. (China)

Published in SPIE Proceedings Vol. 10827:
Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
Yingjie Yu; Chao Zuo; Kemao Qian, Editor(s)

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