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Proceedings Paper

Producing a uniform excimer laser beam for materials processing applications
Author(s): Jenifer Lynn Bunis; Chris Christian Abele; James D. Campbell; George F. Caudle
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Paper Details

Date Published: 1 March 1991
PDF: 7 pages
Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25020
Show Author Affiliations
Jenifer Lynn Bunis, Questek Inc. (United States)
Chris Christian Abele, Questek Inc. (United States)
James D. Campbell, Questek Inc. (United States)
George F. Caudle, Questek Inc. (United States)

Published in SPIE Proceedings Vol. 1377:
Excimer Laser Materials Processing and Beam Delivery Systems
Bernhard P. Piwczyk, Editor(s)

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