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Proceedings Paper

Producing a uniform excimer laser beam for materials processing applications
Author(s): Jenifer Lynn Bunis; Chris Christian Abele; James D. Campbell; George F. Caudle
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Paper Abstract

Virtually every materials processing application which uses an excimer laser requires a uniform beam at the surface of the workpiece. Producing a uniform beam is non-trivial requiring both a uniform discharge and an optimized optical resonator. This paper explores the conditions necessary to produce and maintain a uniform beam as well as various ways of measuring the uniformity. For some applications conditioning optics such as homogenizers are required to further improve the uniformity of the beam. Various types of homogenizers will be described along with techniques used to image the uniform beam onto the surface of the workpiece.

Paper Details

Date Published: 1 March 1991
PDF: 7 pages
Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25020
Show Author Affiliations
Jenifer Lynn Bunis, Questek Inc. (United States)
Chris Christian Abele, Questek Inc. (United States)
James D. Campbell, Questek Inc. (United States)
George F. Caudle, Questek Inc. (United States)

Published in SPIE Proceedings Vol. 1377:
Excimer Laser Materials Processing and Beam Delivery Systems
Bernhard P. Piwczyk, Editor(s)

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