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Proceedings Paper

Material design for the improvement of ZEP520A performance
Author(s): A. Nakajima; T. Kozawa; M. Hoshino; M. Hashimoto
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Paper Abstract

We investigated the effects of molecular weight distribution (molecular weight and dispersity) and developer on the sensitivity and resolution of ZEP series (Zeon Corporation). ZEP520A, ZEP7000, and ZEP530A(under development) are scission-type polymer resists composed of the same structural unit with different molecular weight and dispersity. The sensitivities of ZEP530A (narrow dispersity) and ZEP7000 (high molecular weight) are approximately same and lower than ZEP520A (standard). The resolution of ZEP530A was the highest among the ZEP series.

Paper Details

Date Published: 3 October 2018
PDF: 7 pages
Proc. SPIE 10810, Photomask Technology 2018, 108100O (3 October 2018); doi: 10.1117/12.2501648
Show Author Affiliations
A. Nakajima, Osaka Univ. (Japan)
T. Kozawa, Osaka Univ. (Japan)
M. Hoshino, Zeon Corp. (Japan)
M. Hashimoto, Zeon Corp. (Japan)

Published in SPIE Proceedings Vol. 10810:
Photomask Technology 2018
Emily E. Gallagher; Jed H. Rankin, Editor(s)

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