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Proceedings Paper

What industry needs in a high-power excimer laser
Author(s): John R. Lankard
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Paper Abstract

Scientific, or research excimer lasers have been around since tl1e mid- 1970s, and in the past few years industrial excimer lasers have started to evolve. This paper will address the demands of manufacturing operations on high power excimer lasers, 100 to 200 Watts, operating three shifts a day, seven days a week. The issues of durability, reliability, serviceability, and cost will be addressed.

Paper Details

Date Published: 1 March 1991
PDF: 4 pages
Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25016
Show Author Affiliations
John R. Lankard, IBM/East Fishkill Facility (United States)


Published in SPIE Proceedings Vol. 1377:
Excimer Laser Materials Processing and Beam Delivery Systems
Bernhard P. Piwczyk, Editor(s)

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