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Proceedings Paper

Modeling and simulation of nichrome microheater on polycarbonate substrate
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Paper Abstract

This paper presents the design and simulation of four different structures of nichrome microheater on the polycarbonate substrate. Nichrome layer is covered by the silicon nitride dielectric layer. The comb capacitor covering dielectric layer is used for measuring electrical parameters of liquids. Designed structure allows impedance, resistance and capacitance monitoring of studied substances like chemical or biological liquids, which require constant heating value on the substrate surface. 3D model design and electro-thermal finite elements simulations were carried out by CoventorWare software. Various shapes of the heaters were studied to check the uniformity heating on the active surface.

Paper Details

Date Published: 1 October 2018
PDF: 9 pages
Proc. SPIE 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 1080859 (1 October 2018); doi: 10.1117/12.2501556
Show Author Affiliations
T. Lizak, Lublin Univ. of Technology (Poland)
M. Szypulski, Lublin Univ. of Technology (Poland)
D. Zarzeczny, Lublin Univ. of Technology (Poland)
K. Muzyka, Lublin Univ. of Technology (Poland)
A. Kociubiński, Lublin Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 10808:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018
Ryszard S. Romaniuk; Maciej Linczuk, Editor(s)

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