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Proceedings Paper

Optical studies of nanocrystalline and amorphous TiO2 thin films deposited by HiTUS technique
Author(s): Ihor Studenyak; Olexander Nahusko; Vitalii Izai; Mladen Kranjčec; Peter Kúš; Marian Mikula; Kanat Mussabekov; Andrzej Kociubiński
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Paper Abstract

TiO2 thin films were deposited on glass substrates by HiTUS (high target utilization sputtering) technique. Structural studies of TiO2 thin films of different thickness were performed by X-ray diffraction. Refractive index and extinction coefficient were measured by spectroscopic ellipsometer. Transmission spectra of TiO2 thin films were investigated in the temperature interval 77-300 K. The temperature behaviour of Urbach absorption edge for TiO2 thin film was studied. The effect of temperature on the optical parameters and order-disorder processes in TiO2 thin films was analysed.

Paper Details

Date Published: 1 October 2018
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Proc. SPIE 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 108084W (1 October 2018); doi: 10.1117/12.2501508
Show Author Affiliations
Ihor Studenyak, Uzhhorod National Univ. (Ukraine)
Olexander Nahusko, Uzhhorod National Univ. (Ukraine)
Vitalii Izai, Uzhhorod National Univ. (Ukraine)
Mladen Kranjčec, Univ. North (Croatia)
Peter Kúš, Comenius Univ. in Bratislava (Slovakia)
Marian Mikula, Comenius Univ. in Bratislava (Slovakia)
Kanat Mussabekov, Kazakh Academy of Transport and Communication (Kazakhstan)
Andrzej Kociubiński, Lublin Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 10808:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018
Ryszard S. Romaniuk; Maciej Linczuk, Editor(s)

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