Share Email Print
cover

Proceedings Paper • new

High-resolution laser fabrication of amplitude diffractive structures on thin metal films
Author(s): Victor P. Korolkov; Sergey L. Mikerin; Konstantin A. Okotrub; Alexander R. Sametov; Anatoly I. Malyshev
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Thermochemical direct laser writing of amplitude diffractive structures on thin metal films (Zr, Ta, V, Mo, Cr) at different processing conditions with focused cw laser beam has been experimentally investigated. The study was aimed to select proper material and thickness range ensuring through oxidation, which helps to get higher resolution due to bleaching of the thin absorbing film near peak of intensity distribution of focused laser beam and stopping thermal trace widening. The resistless thermal writing process will be further used as base for developing high-resolution laser lithography system with 266 nm DPSS laser intended for nano-optics fabrication.

Paper Details

Date Published: 25 October 2018
PDF: 11 pages
Proc. SPIE 10823, Nanophotonics and Micro/Nano Optics IV, 108230X (25 October 2018); doi: 10.1117/12.2501246
Show Author Affiliations
Victor P. Korolkov, Institute of Automation and Electrometry of the SB RAS (Russian Federation)
Sergey L. Mikerin, Institute of Automation and Electrometry of the SB RAS (Russian Federation)
Konstantin A. Okotrub, Institute of Automation and Electrometry of the SB RAS (Russian Federation)
Alexander R. Sametov, Institute of Automation and Electrometry of the SB RAS (Russian Federation)
Anatoly I. Malyshev, Institute of Automation and Electrometry of the SB RAS (Russian Federation)


Published in SPIE Proceedings Vol. 10823:
Nanophotonics and Micro/Nano Optics IV
Zhiping Zhou; Kazumi Wada, Editor(s)

© SPIE. Terms of Use
Back to Top