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Proceedings Paper

Surface measurement of axicon lens based on polarization phase-shifting interferometry
Author(s): Zhangfan Wei; Aijun Zeng; Qiao Yuan; Jingpei Hu; Huijie Huang
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Paper Abstract

Axicon is widely used in optical alignment and Bessel–Gauss beam generation. There are rigorous requirements for a highly accurate surface metrology. In this paper, a polarization phase-shifting interferometer measurement method using a concave axicon mirror is proposed to obtain the surface of axicon lens. The measuring beam produced by a polarization phase-shifting interferometer is incident on the flat surface of an axicon lens under test perpendicularly and it is reflected along the original optical path by a concave axicon mirror, which is easy to be manufactured by ultra-precision diamond-turning machine. The reflected beam by the concave axicon mirror interferes with the reflected reference beam by transmission flat (TF) in the interferometer. Consequently, the surface of the axicon lens can be obtained. The measurement method is simple, timesaving and easy to achieve surface metrology of axicon lens of any cone angle. In experiments, the evaluation parameters of the axicon surface profile errors are given by the peak-to-valley(PV) error and Root-Mean-Square(RMS) error. The measurement results verify that the measurement for axicon can be achieved by the proposed method which plays a crucial role in evaluating the manufacturing and image qualities of axicon.

Paper Details

Date Published: 6 November 2018
PDF: 7 pages
Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 108191R (6 November 2018); doi: 10.1117/12.2501224
Show Author Affiliations
Zhangfan Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Aijun Zeng, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Qiao Yuan, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Jingpei Hu, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Huijie Huang, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 10819:
Optical Metrology and Inspection for Industrial Applications V
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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