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Accuracy evaluations of axial localisation algorithms in confocal microscopy
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Paper Abstract

The localisation accuracy of axial peaks is an important factor for height determination in a confocal microscope. Several algorithms have been proposed for height extraction in surface topography measurements. However, some algorithms ignore the influence of error and discrete sampling on the accuracy. This paper analyzes the localisation accuracy of some common algorithms under different aberrations and random errors, and discusses the effect of axial scanning interval on the accuracy of each algorithm. Finally, we get the application scope of each algorithm. Our results offer a reference for selecting algorithms for confocal metrology.

Paper Details

Date Published: 6 November 2018
PDF: 8 pages
Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 108191O (6 November 2018); doi: 10.1117/12.2501031
Show Author Affiliations
Rongjun Shao, Beijing Institute of Technology (China)
Weiqian Zhao, Beijing Institute of Technology (China)
Lirong Qiu, Beijing Institute of Technology (China)
Yun Wang, Beijing Institute of Technology (China)
Ruirui Zhang, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 10819:
Optical Metrology and Inspection for Industrial Applications V
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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