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Proceedings Paper

High-precision 3D measurement of large-sized rough glass using phase-shifting and phase-height mapping
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Paper Abstract

In this paper, a non-contact, fast and high-precision optical 3D measurement method is proposed to provide a detection scheme for the processing of optical rough glass in the grinding stage. We first use a planar calibration board to map the phase-height of the optical rough glass in a certain spatial range, then use the phase-shifting method to obtain the heightmodulated phase distribution of the rough glass. Finally, the 3D profile of the whole rough glass is obtained based on the phase-height mapping. The whole detection process can be completed in a few minutes, and the accuracy is less than 100 microns.

Paper Details

Date Published: 6 November 2018
PDF: 6 pages
Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 108180O (6 November 2018); doi: 10.1117/12.2500943
Show Author Affiliations
Chao Li, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Changhe Zhou, Shanghai Institute of Optics and Fine Mechanics (China)
Yu Yan, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Fantao Bu, Shanghai Institute of Optics and Fine Mechanics (China)
Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 10818:
Holography, Diffractive Optics, and Applications VIII
Yunlong Sheng; Chongxiu Yu; Changhe Zhou, Editor(s)

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