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Proceedings Paper

Method for measuring the spatial characteristics of high-resolution diffraction gratings
Author(s): M. V. Shishova; S. B. Odinokov; A. Y. Zherdev; V. V. Popov
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Paper Abstract

That paper focuses on indirect measurements of the diffraction gratings by analyzing their scattered distribution. The method is based on pre-calculated numerical dependencies of the energy characteristics. The comparison of measured diffraction efficiency values with numerical simulations provide the inverse measurements of the profile height. Presented research belongs to the field of scatterometry of high-resolution diffraction optical elements. The concept is tested with polymeric sinusoidal relief. Considered phase diffraction gratings have interest in field of linear displacement encoders.

Paper Details

Date Published: 8 November 2018
PDF: 5 pages
Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 108180J (8 November 2018); doi: 10.1117/12.2500899
Show Author Affiliations
M. V. Shishova, Bauman Moscow State Technical Univ. (Russian Federation)
S. B. Odinokov, Bauman Moscow State Technical Univ. (Russian Federation)
A. Y. Zherdev, Bauman Moscow State Technical Univ. (Russian Federation)
V. V. Popov, Moscow State Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 10818:
Holography, Diffractive Optics, and Applications VIII
Yunlong Sheng; Chongxiu Yu; Changhe Zhou, Editor(s)

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