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The fabrication and measurement of gold reflective grating
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Paper Abstract

Diffraction grating is widely used in a variety of applications, and the grating must have good quality. In various methods of making large-sized gratings, laser direct writing has obvious advantages. Our research group uses the parallel direct laser writing technology to produce a sinusoidal grating with a size of 100×100mm and line number of 1780 per millimeter. Firstly, the grating is analyzed theoretically to find a groove depth where the sinusoidal grating can reach its highest efficiency, then the grating is produced by laser direct writing and finally coated with a layer of gold. In this paper, we introduce the fabrication and efficiency measurement of grating, and estimate its uniformity. We get 16×16 data points which is divided into 4×3 area from the measurement. For each small area, the efficiency is measured and processed by software, obtaining the efficiency distribution diagram. Most efficiencies are around 90%, which is close to the theoretical calculation. Meanwhile, the efficiency distribution is uniform. Experimental results demonstrated that the developed parallel direct laser writing technology is feasible for writing large-size grating.

Paper Details

Date Published: 8 November 2018
PDF: 6 pages
Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 1081810 (8 November 2018); doi: 10.1117/12.2500811
Show Author Affiliations
Fantao Bu, Shanghai Univ. (China)
Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Yunkai Lu, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Changhe Zhou, Shanghai Institute of Optics and Fine Mechanics (China)
Minkang Li, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Yingjie Yu, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 10818:
Holography, Diffractive Optics, and Applications VIII
Yunlong Sheng; Chongxiu Yu; Changhe Zhou, Editor(s)

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