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Proceedings Paper

Precision measurement of specular spherical surfaces based on monoscopic phase measuring deflectometry
Author(s): Zhenqi Niu; Xiangchao Zhang; Xueyang Xu; Yifan Zhu; Shaoliang Li; Wanliang Zhao
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Paper Abstract

In recent years, the measurement of specular aspheric surface has attracted intensive attention in precision engineering. Phase measuring deflectometry is a powerful measuring technique, which could accurately measure specular surfaces. The software configurable optical test system and a four step phase shifting approach are applied to obtain the normal vectors of the measured surface. The geometric parameters are recalculated by optimization to improve the calibration accuracy. Then the surface is reconstructed using a optimization algorithm. The configuration parameters should be set according to specific surface shapes and measuring conditions. Numerical experiments demonstrate that good performance can be achieved using this method.

Paper Details

Date Published: 2 November 2018
PDF: 7 pages
Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 1081912 (2 November 2018); doi: 10.1117/12.2500767
Show Author Affiliations
Zhenqi Niu, Fudan Univ. (China)
Xiangchao Zhang, Fudan Univ. (China)
Xueyang Xu, Fudan Univ. (China)
Yifan Zhu, Fudan Univ. (China)
Shaoliang Li, Shanghai Institute of Spaceflight Control Technology (China)
Wanliang Zhao, Shanghai Institute of Spaceflight Control Technology (China)


Published in SPIE Proceedings Vol. 10819:
Optical Metrology and Inspection for Industrial Applications V
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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