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Preparation of composite anti-reflective and protective films with diamond-like carbon films coated on ZnS substrate
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Paper Abstract

Common anti-reflective films on Sulfide Zinc(ZnS) Substrate has low hardness and poor protective effect, thus cannot meet the requirement of harsh environment. Composite anti-reflective and protective films with ZnS, YbF3 and DLC films are developed. This Diamond-like Carbon(DLC) films with high infrared transmittance and high hardness is developed by quasi-molecule laser in vacuum. The deposition parameters and performance of DLC and YbF3 films are optimized. The adhesion performance of the composite films is improved by introducing optimized adhesive coating, optimized thickness of DLC films and so on. The composite films has many advantages such as high transmittance in far IR region, good adhesion, anti-scratch performance, it also can pass boil water test, tape adhesion test and scrub test.

Paper Details

Date Published: 9 November 2018
PDF: 4 pages
Proc. SPIE 10826, Infrared, Millimeter-Wave, and Terahertz Technologies V, 108260W (9 November 2018); doi: 10.1117/12.2500689
Show Author Affiliations
Yanlong Guo, Army Engineering Univ. of PLA (China)
Xi Zhang, Army Engineering Univ. of PLA (China)
Wenhong Chen, Army Engineering Univ. of PLA (China)
Guojun Huang, Army Engineering Univ. of PLA (China)
Yong Zhang, Army Engineering Univ. of PLA (China)
Yanrong Ouyang, Army Engineering Univ. of PLA (China)
Jie Fang, Army Engineering Univ. of PLA (China)
Shan Zhang, Army Engineering Univ. of PLA (China)
Yimin Lu, Army Engineering Univ. of PLA (China)


Published in SPIE Proceedings Vol. 10826:
Infrared, Millimeter-Wave, and Terahertz Technologies V
Cunlin Zhang; Xi-Cheng Zhang; Masahiko Tani, Editor(s)

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