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Proceedings Paper

Direct phase determination using simple phase lock loop for heterodyne displacement-measuring interferometers
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Paper Abstract

In this paper, direct phase determination method which is based on the phase-locked loop technique and the null method is proposed for heterodyne-displacement-measuring interferometers. The requirement of the proposed method is to detect high-speed phase changes in the phase shift between two sinusoidal input signals, leading to measuring high-speed displacements in industrial applications. The method is estimated for two situations that include the use of (a) two pure sinusoidal signals from a function generator and (b) two interferometric signals from a heterodyne interferometer, which is integrated to an electro-optic modulator for phase modulation. The experimental results of the method provide the phase-variation-measuring speed with a modulation frequency of 20kHz in the 2.7MHz-input sinusoid. The principle, signal-processing program, experiments and results of the method are presented in the paper.

Paper Details

Date Published: 6 November 2018
PDF: 10 pages
Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 1081907 (6 November 2018); doi: 10.1117/12.2500626
Show Author Affiliations
Thanh-Dong Nguyen Sr., Nagaoka Univ. of Technology (Japan)
Quang-Anh Duong Sr., Nagaoka Univ. of Technology (Japan)
Masato Higuchi, Nagaoka Univ. of Technology (Japan)
Wei Dong, Nagaoka Univ. of Technology (Japan)
Masato Aketagawa, Nagaoka Univ. of Technology (Japan)


Published in SPIE Proceedings Vol. 10819:
Optical Metrology and Inspection for Industrial Applications V
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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