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Proceedings Paper

Grating interferometry with high optical subdivision
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Paper Abstract

In this paper, we propose a high-density grating interferometry system, which can be applied to measure displacement on the nanometer precision. We make use of the optical subdivision module to improve the measurement resolution which is better than the traditional one. The core part of the whole system is a grating with high-density of 1780 lines/mm and long-range of 100mm*100mm. The apparatus adopts a symmetrical structure to reduce the error resulting from environmental disturbance. The system provides a novel measurement technique to improve the grating interferometry. The experimental results show that the grating interferometer system has good stability, and the in-situ measurement error is within ±5 nm for a long time. The grating interferometer can measure the short distance displacement of 30 nm and can control the error within ±2 nm. The measurement of the distance of 10 mm can control the error within ±20 nm. The results proves the feasibility of our proposed improved.

Paper Details

Date Published: 6 November 2018
PDF: 15 pages
Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 108181O (6 November 2018); doi: 10.1117/12.2500576
Show Author Affiliations
Shiyao Zhu, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
ShanghaiTech Univ. (China)
Changhe Zhou, Shanghai Institute of Optics and Fine Mechanics (China)
Minkang Li, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Chunlong Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Junjie Yu, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 10818:
Holography, Diffractive Optics, and Applications VIII
Yunlong Sheng; Chongxiu Yu; Changhe Zhou, Editor(s)

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