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Orthogonal crossed gratings fabricated by scanning Dammann lithography
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Paper Abstract

Orthogonal crossed gratings, or two-dimensional (2D) gratings are key optical elements in plane optical encoders. In this paper, Scanning Dammann lithography (SDL) was implemented to fabricate gold-coated 2D gratings by stepping and scanning a 2D air-bearing stage and rotating Dammann gratings. A displacement measurement interferometer (DMI) was applied to monitor the 2D stage which ensured the positioning accuracy of exposing. A series of experiments by varying the exposure dose were conducted. The atomic force microscope (AFM) results indicted the duty cycle changed with the exposure dose. A 2D gold-coated grating with a size 100*100mm was also fabricated. Since it is straightforward to extend the size of the substrate up to hundreds of millimeters, SDL is a promising method to fabricate large-sized 2D gratings with controllable duty cycle.

Paper Details

Date Published: 8 November 2018
PDF: 6 pages
Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 108180V (8 November 2018); doi: 10.1117/12.2500281
Show Author Affiliations
Minkang Li, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Changhe Zhou, Shanghai Institute of Optics and Fine Mechanics (China)
Chunlong Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Wei Jia, Shanghai Institute of Optics and Fine Mechanics (China)
Xiansong Xiang, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Shiyao Zhu, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Fantao Bu, Shanghai Institute of Optics and Fine Mechanics (China)
Yunkai Lu, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 10818:
Holography, Diffractive Optics, and Applications VIII
Yunlong Sheng; Chongxiu Yu; Changhe Zhou, Editor(s)

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