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Continuous detection of particles on a rotating substrate during thin film deposition
Author(s): Anna Karoline Rüsseler; Istvan Balasa; Lars Jensen; Detlev Ristau
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Paper Abstract

Particles, which contaminate the substrate during thin film deposition, are prone to cause irremovable defects and demand special attention in the field of high precision laser optics as they can lead to localized absorption and laser damage. In this contribution, we present a camera based fully in-vacuum device which continuously monitors the coating surface of a transparent test substrate under dark field illumination. We show the possibilities of this setup regarding the sensitivity to small particles (diameter 1 μm). As the first operational test of the particle monitor, singe layers of HfO2 are grown on fused silica. By analyzing the evolution of the scattering intensity of the particles, we derive their position in the substrate-coating-system. Therefore, this in situ particle detection concept can deliver data on which process step is responsible for particle generation in multilayer films and aims to be a tool to minimize coating defects.

Paper Details

Date Published: 19 November 2018
PDF: 8 pages
Proc. SPIE 10805, Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 108051X (19 November 2018); doi: 10.1117/12.2500210
Show Author Affiliations
Anna Karoline Rüsseler, Laser Zentrum Hannover e.V. (Germany)
Istvan Balasa, Laser Zentrum Hannover e.V. (Germany)
Lars Jensen, Laser Zentrum Hannover e.V. (Germany)
Detlev Ristau, Laser Zentrum Hannover e.V. (Germany)
Leibniz Univ. Hannover (Germany)


Published in SPIE Proceedings Vol. 10805:
Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference
Christopher Wren Carr; Gregory J. Exarhos; Vitaly E. Gruzdev; Detlev Ristau; M.J. Soileau, Editor(s)

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